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MEMS and MEMS: System Devices and Structures

Lyshevskj, Sergey E

MEMS and MEMS: System Devices and Structures - Boca Raton CRC Press 2002 - 461p.

ISBN: 9780849312625

Subjects--Topical Terms:
Mechatronics

Dewey Class. No.: 621.381 / LYS, S E

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