Plasma Electronics:Applications in Microelectronic Device Fabrication (Record no. 114809)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00385nam a2200145Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 240416s9999||||xx |||||||||||||| ||und|| |
| 020 ## - ISBN | |
| Price | RS 12261.50 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | School of Electronics Engineering Library |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Makabe,Toshiaki |
| 245 #0 - TITLE STATEMENT | |
| Title | Plasma Electronics:Applications in Microelectronic Device Fabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | CRC Press |
| Date of publication, distribution, etc | 2015 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Pages | xxxv,376p. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Location (home branch) | Sublocation or collection (holding branch) | Date acquired | Koha issues (times borrowed) | Accession No. | Koha date last seen | Koha item type | Non-public note | Public note | Cost, normal purchase price | Source of acquisition |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | School of Electronics Engineering Library | School of Electronics Engineering Library | 02.02.2019 | KSEE71356 | 16.04.2024 | Reference | IN27221 | 24/07/2018 | 7969.98 | OVE |