Pelesko, John A. <br/><br/>
Modeling MEMS & NEMS 

 - Boca Raton  Chapman & Hall  2003 
 - xxiii,357p. 
<br/><br/><label>ISBN: </label> RS 7530.92 
<br/><br/><label>Dewey Class. No.: </label>621.3 PEL, J.A.