Madou Marc J <br/><br/>
Fundamentals of Microfabrication and Technology 

 - 3rd ed 
 - Boca Raton  CRC Press  2012 
<br/><br/><label>ISBN: </label> RS 17889.00 (set of 3 vol.) 
<br/><br/><label>Dewey Class. No.: </label>621.38 MAD, M J