Trimmer, William S. <br/><br/>
Micromechanics and MEMS 

 - New York  IEEE Press  1997 
 - xv,701p. 
<br/><br/><label>ISBN: </label> RS 20053.55 
<br/><br/><label>Dewey Class. No.: </label>621.381 TIR, W.S.