Allen,J.J <br/><br/>
Micro Electro mechanical System Design 

 - 1st.ed. 
 - Boca Raton  CRC Press  2015 
 - 465p. 
<br/><br/><label>ISBN: </label> RS 995.00 
<br/><br/><label>Dewey Class. No.: </label>621 ALL,J.J