Lyshevskj, Sergey E <br/><br/>
MEMS and MEMS: System Devices and Structures 

 - Boca Raton  CRC Press  2002 
 - 461p. 
<br/><br/><label>ISBN: </label>9780849312625 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechatronics
<br/><br/><label>Dewey Class. No.: </label>621.381   / LYS, S E