TY  - GEN
AU  - Lyshevskj, Sergey E
TI  - MEMS and MEMS: System Devices and Structures
SN  - 9780849312625
U1  - 621.381  
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - Mechatronics
ER  -