Lyshevshi, Sergey Edward <br/><br/>
MEMS and NEMS:Syestems,Devices and Structures 

 - 1st 
 - Boca Raton  CRC Press  2010 
 - 461p. 
<br/><br/><label>ISBN: </label>0849312620  RS 850.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Biotechnology
<br/><br/><label>Dewey Class. No.: </label>621.381   / LYS