TY  - BOOK
AU  - Lyshevshi, Sergey Edward
TI  - MEMS and NEMS:Syestems,Devices and Structures
SN  - 0849312620
U1  - 621.381  
PY  - 2010///
CY  - Boca Raton
PB  - CRC Press
KW  - Biotechnology
ER  -