Paik,Ungyu <br/><br/>
Nano Particle Engineering For Chemical Mechanical Planarization 

 - 1st 
 - New York  CRC Press  2010 
 - xiii,191p. 
<br/><br/><label>ISBN: </label> RS 12348.00 
<br/><br/><label>Dewey Class. No.: </label>520.5 PAI