| 000 | 00368nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 240416s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _cRS 7350.00 | ||
| 040 | _aKSEE | ||
| 082 | _a670 GEN,H | ||
| 100 | _aGeng,Hwalyu. | ||
| 245 | 0 | _aSemiconductor Manufacturing Handbook. | |
| 250 | _a1st | ||
| 260 |
_aNewyork _bMGH _c2005 |
||
| 300 | _axxi,1521p. | ||
| 942 | _cBK | ||
| 999 |
_c113213 _d113213 |
||