| 000 | 00385nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 240416s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _cRS 12261.50 | ||
| 040 | _aKSEE | ||
| 100 | _aMakabe,Toshiaki | ||
| 245 | 0 | _aPlasma Electronics:Applications in Microelectronic Device Fabrication | |
| 250 | _a2nd | ||
| 260 |
_aNew York _bCRC Press _c2015 |
||
| 300 | _axxxv,376p. | ||
| 942 | _cBK | ||
| 999 |
_c114809 _d114809 |
||