| 000 | 00414nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 240417s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _cRS 21056.35 (set of 3 vol.) | ||
| 040 | _aSME | ||
| 082 | _a621.381 GAD,M. | ||
| 100 | _aGad El Hak,Mohamed | ||
| 245 | 4 | _aThe MEMS handbook: applications | |
| 250 | _a2nd ed | ||
| 260 |
_aBoca raton _bTaylor Fracis _c2006 |
||
| 300 | _axii, Various paging | ||
| 942 | _cBK | ||
| 999 |
_c122579 _d122579 |
||