| 000 | 00435 a2200169 4500 | ||
|---|---|---|---|
| 005 | 20250208152202.0 | ||
| 008 | 250130b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780849312625 | ||
| 040 | _aSME | ||
| 082 |
_a621.381 _bLYS, S E |
||
| 100 | _aLyshevskj, Sergey E | ||
| 245 | _aMEMS and MEMS: System Devices and Structures | ||
| 260 |
_bCRC Press _c2002 _aBoca Raton |
||
| 300 | _a461p. | ||
| 650 | _aMechatronics | ||
| 942 | _cHB | ||
| 999 |
_c205463 _d205463 |
||