000 00398nam a22001457a 4500
008 250208b |||||||| |||| 00| 0 eng d
020 _a9781032122144
_c9907.90
040 _aKSEE
082 _a686.23
_bRYU
100 _aRyu,Yu.Kyoung
245 _aScanning probe Lithography: Fundamentals,Materials and Applications
260 _aNew York
_bCRC Press
_c2023
300 _axv,128p.
942 _cBK
999 _c205748
_d205748