000 00421nam a2200169Ia 4500
008 240413s9999||||xx |||||||||||||| ||und||
020 _cRS 13068.30
040 _aCLIB
082 _a530 HAR
100 _aHarding, Kevin
245 0 _aHandbook of Optical Dimensional Metrology
250 _a1st
260 _aNew York
_bCRC Press
_c2013
300 _axiii,492p.
650 _aPhysics
_vOptics, metrology
942 _cBK
999 _c87557
_d87557