000 00353nam a2200157Ia 4500
008 240413s9999||||xx |||||||||||||| ||und||
020 _cRS 17563.80
040 _aCLIB
082 _a621.8 GAO
100 _aGao, Wei
245 0 _aPrecision Nanometrology
250 _a1st
260 _aLondon
_bSpringer
_c2010
300 _axiii,354p.
942 _cBK
999 _c88567
_d88567